Diffusion Furnace Controller Upgrade
 

Upgrade overview
• The ProTemp controller upgrade is applicable to diffusion furnaces from most manufacturers, including Thermco, Bruce, and Lindberg/Tempress
• The upgrade includes:
  • New digital process, temperature, gas system and loader controllers per tube level
  • New PC host computer with Windows®-based operating system
  • New touch-screen monitor
• All work is done by our technicians at your site, with no interruption of production on adjacent systems
• Typical installation time is only 3 working days — and your furnace system is back into production
• Please contact us for a proposal on your specific requirements
   

Process/Temperature Control System
The digital control system comprises a HOST PC and a controller for each tube, mounted at tube level in the load station. Associated temperature I/O modules are mounted in the gas cabinet base. The system provides local recipe management and data acquisition.

  All parameters of each process run, as well as operator identification, are data logged and stored in Microsoft Access™ data tables and may be recalled on the monitor, sent to a remote location or printed out. Data may be reviewed with Microsoft Access™. Each process is archived when it is downloaded and other parameters (gas flow, temperatures, valve positions, etc.) are monitored at least every 15 seconds and data logged.

  The system automatically captures process control information during all runs which may be displayed in an easy-to-read graph, either during capture or from a history file. The graph shows absolute engineering values versus time and two plots can be shown simultaneously so that you may compare a run with a recipe or two runs with each other. Axis can be magnified to study specific process problems, such as furnace recovery after product loading.

  An event log, maintained in both a rolling and a permanent file, keeps track of all processes and user events. You can sort the log by as many as ten criteria to display information in the most useful way.

  Real-time data (gas flow, temperatures, valve positions, etc.) is displayed on the HOST monitor in a graph form and be printed out.

  12-bit D/A and A/D converters are located within two feet of each MFC, minimizing cable length and number of connections for optimum reliability. 		  The D/A and A/D converters and MFC's use a common power supply, eliminating reference voltage problems associated with multiple power supplies. The result is exceptionally precise MFC control.

  The temperature I/O modules provide high-resolution (0.05C), 1500-volt isolation between thermocouples plus individual cold-junction compensation for each TC. Each module also contains local digital conversion and optical isolation. This entirely solid-state temperature and power driver package provides accurate and dependable temperature control.

  A network option lets you connect one or more furnaces to remote engineering terminals. Equipment and process engineers can then access tube status, recipes, data capture files and event logs from PCs in their offices. Local recipe edits can be backed up automatically on remote terminals.

  The HOST PC can interface with your production control system using a bridge PC with appropriate communications software. As a batch of wafers enters a furnace step the production control system sends a message to the bridge PC to download the recipe to the selected tube.

  Process or power failure aborts may be programmed to branch into pre-programmed recipes (to save the run of wafers, or change the process parameters to accommodate the abort) or to completely abort the run and have the wafer removed from the process tube in a safe manner. In all cases a audible alarm sounds and the abort cause is shown on the HOST monitor.
 

Digital Temperature/Process Sequence Controller

(One controller per tube level)
Temperature Ramping
  • High resolution, bipolar analog output
  • Electrically isolated from other functions
  • Furnace set-point capability
  • Individual set-points for each cycle
  • Automatically ramped over cycle duration
Multiple Process Recipes
  • 16 recipes; each recipe includes up to 100 steps
  • Simultaneous programming and operation
  • Programmable “idle” cycle for each recipe
  • Unique “count-up” cycle at end of each recipe
  • Battery backup
  • Programmable time base (minutes, seconds)
  • Programmable alarms
  • Manual mode
  • Alphanumeric status messages
Host system hardware & software
  • Windows® based PC
  • Keyboard, color monitor and system mouse
  • 8 programmable levels of system security
  • Download run parameters
  • Viewing recipe parameters
  • Recipe storage, changes & editing
  • Plotting & trending
  • Production management interface
  • Remote operation & modem interface
 
Digital Inputs and Outputs
  • 16 relay-isolated outputs, 8 opto-isolated inputs
  • Power-fail software
  • “Interlock” inputs for programmable branching
  • "Wait" inputs for programmable holds
Analog Outputs and Inputs
  • Built-in recipes for OEM applications
  • Eight 0 to 5 volt analog outputs/inputs
  • Multiple set-points for each output
  • Display of analog set-points and actual ???
  • Analog inputs monitor process parameters
  • Programmed branching on analog inputs
  • Total-time-remaining display
  • Manual abort
  • Power-up diagnostics
  • Completed runs counters
Warranty
  • 3 years from date of installation. Includes site license & software upgrades
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