SolaReactor™

AR Film and POCl3 Deposition Systems
 
Designed specifically for the solar industry, the SolaReactor™ deposits a dual refractive index PECVD AR film and low sheet resistance POCl3 deposition to produce highly efficient solar cells.
The SolaReactor™ provides increased yields and superior reflective value films, compared with atmospheric TiNitride process. The SolarReactor™ deposits a dual refractive index nitride film using an included process to produce one of the most efficient AR coatings available. The POCl3 configuration controls the sheet resistance to a high degree of accuracy.
  • Compact: floor space required is less than 4.2m² (45.9 ft²).
  • Each tube level PC-controlled for functional capability and ease of operation
  • Host computer with touch-screen and keyboard/mouse controls
  • POCl3 and PECVD processes available in the same system
  • Large bore — accommodates substrates up to 210mm diameter/diagonal
  • Processes either poly-crystalline or mono-crystalline substrates
  • Fully automatic insertion/retraction of preloaded substrate boats
  • Deposited/undeposited substrate boats exchanged in <10 seconds
  • Incorporates proven technologies developed over the last 40 years in the semiconductor and solar industries
  
More information on anti-reflective coatings
 
See system outline drawing
 
Download PowerPoint presentation of features and benefits (331KB)
Each SolarReactor™ system is capable of processing more than 15 MILLION finished POCl3 or over 7.7 MILLION finished PECVD substrates per year.
 
 
     
     Complete AR film deposition system
   All SolaReactor™ systems feature:
  • POCl3 & PECVD configuration capability
  • In-line load station (Class 10 HLF optional)
  • Automatic cantilever loader for each tube level
  • Gas cabinet with plumbing and MFC controlled gas systems
  • Independent s/s scavenger at each tube level
  • PC-based process/temperature control system with host computer and touch screen controls
     
   Element System  
Rear tube-pull gas cabinet with vertical gas panels
  • FasTemp™ low thermal mass elements
  • T/CTrack™ Thermocouple system
   Compact
  • Minimum footprint—complete furnace system occupies only 3.8m² (40.4 ft²), which includes the load station, furnace and gas cabinet
  • Low profile: at 2.03m (80") overall height, the SolaReactor™ is the lowest, large-bore AR film system in the industry
   Configuration versatility
  • Left hand or right hand configuration available
  • Stand-alone or through-wall configurations
  • May be configured with all POCL3 or PECVD processes or a mixture of both
     

POCl3 temperature controllers		      Fully equipped
  • Individual SCR power packs for each zone
  • Redundant over-temperature system for each zone and cabinet temperature. These systems are independent of the PC control system.

Inline load station with optional
Class 10 horizontal laminar flow
 
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