| |
Saturn™ Direct Replacement
Furnace Heating
Elements |
Available for all
applications
ProTemp Saturn™ elements are available for all
furnace makes, in sizes from 4-inch to 18-inch I.D. Elements are compatible
with existing furnace electrics for easy installation.
Three series of elements are available
|
| • |
Standard
elements are the element of choice for all applications that match original
equipment elements |
| • |
HiTemp™ high temperature elements are
designed for operating temperatures to 1350°C |
| • |
FasTemp™ elements employ light gauge
heating wire to substantially reduce times to reach operating temperature and
return to ambient. These elements are made for replacements in horizontal and
vertical furnaces |
Unique graded
insulation
The alumina and silicon oxide fiber insulation system
makes ProTemp elements superior to other diffusion furnace elements. This
unique insulation has the best K factor of any insulation in the industry.
Our vacuum molding process allows us to grade the insulation,
keeping the high density at the coil. This grading provides a better insulation
factor resulting in lower skin temperature, less power consumption, and a
smaller O.D. element. |
| |
Extended flat
zone
Variable pitched ceramic spacers between the heating coils
extend the temperature flat zone and eliminate “bat wings” at the end
of the center zone. Typically, Protemp elements exhibit a longer flat zone than
the original equipment, with temperature variations less than ±1°C
within the flat zone.
Stainless steel
encapsulation
The shell and end caps of ProTemp elements are
fabricated from stainless steel to withstand the rigors of high temperature
operation and provide a particle free enclosure. |
|
 |
| |
|
|
High temperature terminal
connections
New stainless steel terminals are anchored to the
element skin, preventing any tension from lead cables affecting the connection
or the heating coils. Other manufacturers using wire material for the terminals
experience electrolysis at the connection to the lead cables, eventually
burning off the lugs. Also, unsupported terminals can cause distortion of the
heating wire at the connection to the leads. |
|
 |
| |
Low cost upgrade to
larger process tube
ProTemp replacement elements have a larger
I.D. for the same O.D. as competitive elements because of their superior
insulating technique. This allows you to install larger process tubes in older
furnaces, and upgrade to bigger wafers, without the expense of replacing the
entire furnace.
Superior low temperature
operation
Most diffusion furnaces were designed before low
temprature processing became a standard industry process. Elements designed for
high temperature operation generally perform poorly at low
temperature.
ProTemp supplies elements designed specifically for high
temperature (up to 1400°C) or low temperature (600°C and below)
operation, to match your application. Using high density windings to avoid low
frequency thermal cycling, our low-temperature elements provide superior
performance over conventional elements for low-temperature
operation.
Reduced power
consumption
10 to 20% less power is required for the same process
temperatures when using a ProTemp element, versus other elements, because of
our unique vacuum molding process. This process grades the insulation density
to produce high density at the element and low density at the outer surface,
creating a superior insulation system.
Increased
element life
ProTemp elements embody many unique design features
to eliminate hotspots and overheating of the element wire and leads, resulting
in extended life at high temperature operation. Unique “attached”
electrical terminals eliminate coil sag caused by stress from electrical
cables.
Pretested, oxidized, ready to use
Most heating
elements made today have not been adequately “burned in” or
pre-oxidized at high temperatures by the manufacturer before shipment,
therefore requiring you, the customer, to perform this task. ProTemp elements
have been burned in to eliminate insulation binders and pre-oxidized at high
temperature to greatly reduce installation time.
Parts and
Accessories
ProTemp supplies tube adapters, soft
collars and seals, in any configuration, to match your specific needs.
Semiconductor diffusion furnaces
ProTemp supplies the
Sirius™ line of complete horizontal
diffusion furnace systems, for wafers to 150 mm, 200 mm, and 300 mm.
ProTemp also supplies reconditioned pre-owned
systems as well as reconditioning and upgrade products and
services. |
|
