Semiconductor Furnace
Reconditioning and Upgrading
 

Reconditioning and upgrading your semiconductor system
ProTemp Products has in-house facilities for refurbishing or reconfiguring a customer's diffusion furnace system. This includes upgrading to larger wafer processing capability, process reconfiguration, adding automatic loading systems and upgrading controls.
 

Previously-owned furnace systems
ProTemp Products offers reconditioned diffusion furnace systems at a greatly reduced price compared to new systems. These fully reconditioned systems (Thermco, Tempress, Bruce, etc.) may be configured to a customer's specific processing requirements.
 

Add-ons for semiconductor furnaces

The following add-ons may be applied to most semiconductor furnace systems.
 
• Diffusion Furnace Controller Upgrade: Provides the same process/temperature control and Host Computer as included in ProTemp Sirius™ Systems.
• Automatic Loader system: Cantilever loader system assures repeatable insertion of wafers into the furnace for consistent process results.
• Coil Sag Detector System: Allows heating elements to be replaced before potential damage to SiC process tubes.
• T/CTrack Thermocouple System: Eliminates problems of cold joints where thermocouple wires connect at a junction block.
• Hydrogen Burn-off System: May be installed in the scavenger exhaust to eliminate the possibility of excess hydrogen escaping into the central exhaust system.
• External Torch Assembly: Produces wet O2 oxidation without adversely affecting the furnace temperature profile or the leading wafers in the boat.