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| The PECVD Process |
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| PECVD boats are configured to hold 144
substrates per run. |
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| Process Steps |
|
| 1. Load and temperature
stabilization |
18 – 20 minutes |
| |
|
| 2. Silicon Nitride AR layer
(~1500Å thick at 300Å/min. Anti-Reflective Dual Refractive Index
layer) |
4 – 5 minutes |
| |
|
| 4. Purge to atmosphere and unload |
4 – 5 minutes |
| |
|
| Total process time |
26 – 30 minutes |
| |
|
Process tube cleaning
The
process tube liner may easily be removed and a spare liner installed in ~ 5
minutes. The removed liner may be wet etched clean in ~ 30 minutes. This clean
cycle typically needs to be done every 3–4 weeks depending on usage of
system.
Process guarantee
3 consecutive runs at 1 sigma,
±3% wthin substrate, ±5% within boat and run-to-run. This is a
process guarantee; actual values typically are significantly better.
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