| General features |
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The ProTemp Automatic Loader
System is available in Pusher/Puller, Twin-rod Cantilever and Paddle Cantilever
models. The Twin-rod Cantilever model is shown below.
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- Drive System includes a DC drive motor with a
precision leadscrew drive. This assures consistent torque throughout speed
range
- Manual panel (independent from computer control) with
independent adjustments for in and out speeds: ½–40 in/min.
(12–1016mm/min.)
- Interface to process controller for one-button
operation
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| Cantilever features |
- Accurate alignment between the loader and the furnace
is extremely critical to assure consistent temperature and gas flow
characteristics. Maintaining these characteristics accurately will assure
consistent and repeatable film depositions.
- Critical alignment between the cantilever drive rail
assembly and process tube centerline is simple, quick and extremely
accurate.
- The head assembly enables twin-rod parallelism to be
easily adjusted with minimum effort.
- Wafer load changes and initial setup can be easily
accomplished.
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Tube seal – atmospheric
The spring-loaded
mechanism for the quartz end plate tensioning assembly assures positive contact
with the process tube during cantilever operation without operator assistance.
This minimizes potential particulate contamination of the
wafers/process.
Tube seal – LPCVD.
A bellows-sealed
stainless steel door assembly assures positive contact with the vacuum flange
assembly during cantilever operation without operator assistance. This assures
positive sealing for process tube pump-down. |
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