A good anti-reflective coating (ARC) is vital for solar
cell performance as it ensures a high photocurrent by minimizing reflectance.
Unlike many other optoelectronic devices, solar cells operate at a range of
wavelengths, from 300 - 1200nm, which means they need a broadband ARC. Typical
industrial multi-crystalline silicon solar cell manufacture accomplishes this
by depositing a single layer ARC which does not minimize reflectance over a
large range of wavelengths although it reduces reflection dramatically compared
with a bare silicon surface.
The best ARC structure combines SiN and
SiO2 which minimizes reflectance over a large range of
wavelengths.
The SolaReactor™ system deposits, in situ, a
double layer anti-reflective coating based on the refractive index limits of
silicon nitride (SiN) and silicon oxide (SiO2). Depicted below is an
example of the cross-section of a typical SolaReactor™ double layer
anti-reflective coating. |
