World-wide supplier of semiconductor and solar cell process equipment

Sirius™ Diffusion Furnace Systems

Complete systems for 150/200/300mm wafers

SolaReactor™ AR Film and POCl₃ Deposition Systems

Designed specifically for the solar industry, the SolaReactor™ deposits a dual refractive index PECVD AR film and low sheet resistance POCl₃ deposition to produce highly efficient solar cells

UltraDep™ Single Wafer PECVD System

Superior thin-film deposition at a fraction of today's typical costs

Saturn™ Direct Replacement Furnace Heating Elements

Standard, HiTemp™ and FasTemp™ elements, plus parts and accessories

ProTemp Global Support

All-new systems, pre-owned systems, system refurbishment
and expansion, on-site service and support world-wide

ProTemp-Laminar Flow Control Specialists

Mass-flow controller and pressure transducer sales, calibration and repair